Investigation into the Characteristics of A-C:H Films Irradiated by Electron Beam

SL GU,YL HE,ZC WANG
DOI: https://doi.org/10.1117/12.47212
1991-01-01
Abstract:The characteristics of a-C:H films irradiated by different doses of electron beam have been studied by x-ray diffraction. IR absorption, Raman scattering, and resonant nuclear reaction. Such irradiation can lead the structure of a-C:H films to change in a different degree. The proportions of diamond crystalline and graphite structures in a-C:H films have a proper change simultaneously. The experimental results show a relationship to the action of hydrogen and a proper explanation is given.
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