Investigation of Resistive Switching in Graphite-Like Carbon Thin Film for Non-Volatile Memory Applications

Bing Ren,Lin Wang,Linjun Wang,Jian Huang,Ke Tang,Yanyan Lou,Dachao Yuan,Zhangmin Pan,Yiben Xia
DOI: https://doi.org/10.1016/j.vacuum.2014.03.021
IF: 4
2014-01-01
Vacuum
Abstract:Graphite-like carbon films were deposited on Al/SiO2/Si substrates by using Direct Current magnetron sputtering method. Stable and reliable bipolar resistive switching (RS) characteristics were observed in Cu/a-C/Al/SiO2/Si multi-layer structures. An ON/OFF ratio of about 3, a retention time of more than 10(5) s, and switching threshold voltages of less than 3 V were achieved. I-V properties in both low resistance state and high resistance state can be well explained by the space charge limited current model. The observed RS behaviors are attributed to the electron trapping and detrapping at deep level defects in a-C films. (C) 2014 Elsevier Ltd. All rights reserved.
What problem does this paper attempt to address?