Atomic oxygen treatment effects on magnetron sputtered Zr–Ti binary films

weipeng wang,zhengcao li,zhengjun zhang,shangli dong,yong liu
DOI: https://doi.org/10.1016/j.apsusc.2014.11.010
IF: 6.7
2015-01-01
Applied Surface Science
Abstract:•Magnetron sputtered Zr–Ti films from different substrate temperature were atomic oxygen treated.•Films from different TS show variations in crystalline structure and morphology.•Upon AO treatment, the films were top surface oxidized and eroded.•Film with weak crystallization shows better AO resistance while (0002) textured one show the worst.•Preferred erosion of Zr lead to the properties’ modification of (0002) textured film.
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