Fabrication of reflective micromirror in micromechanical optical switches

wei dong,weiyou chen,han yang,long zhang,ping ji,wenbin guo,caixia liu,xindong zhang,dongming sun,cuiping jia,jianxuan pan

DOI: https://doi.org/10.1117/12.483156

2002-01-01

Abstract:Using pure aqueous KOH solution and a one-level mask, the reflective micromirror in the direction <100> and the fibers self-aligned V-grooves in the direction <110> were fabricated on the (100) silicon. Reflective micromirror is a part of {100} family; the surface of the mirror is perpendicular at the optical axes. The deviation brought by manual assemble can be decreased by crystal orientation self-aligned between the micromirror and fibers. Using Atomic Force Microscope (AFM), the measured the surface roughness of the reflective micromirror is below 40 nm, at a wavelength of 1550 nm the reflectivity of the micromirror was measured to be higher than 80%.