Abstract:Polycrystalline diamond growth by microwave plasma chemical vapor deposition (MPCVD) at high-pressure (34.5 kPa) was investigated. The CH₄/H₂/O₂plasma was detected online by optical emission spectroscopy (OES), and the spatial distribution of radicals in the CH₄/H₂/O₂plasma was studied. Raman spectroscopy was employed to analyze the properties of the diamond films deposited in different oxygen volume fraction. The uniformity of diamond films quality was researched. The results indicate that the spectrum intensities of C₂, CH and Hα decrease with the oxygen volume fraction increasing. While the intensity ratios of C₂, CH to Hα also reduced as a function of increasing oxygen volume fraction. It is shown that the decrease of the absolute concentration of carbon radicals is attributed to the rise volume fraction of oxygen, while the relative concentration of carbon radicals to hydrogen atom is also reducing, which depressing the growth rate but improving the quality of diamond film. Furthermore, the OH radicals, role of etching, its intensities increase with the increase of oxygen volume fraction. Indicated that the improvement of OH concentration is also beneficial to reduce the content of amorphous carbon in diamond films. The spectrum space diagnosis results show that under high deposition pressure the distribution of the radicals in the CH₄/H₂/O₂plasma is inhomogeneous, especially, that of radical C₂ gathered in the central region. And causing a rapid increase of non-diamond components in the central area, eventually enable the uneven distribution of diamond films quality.

C 2 and CH Rotational Temperatures in Diamond Growth Using CO 2 Laser-Assisted Combustion-Flames

Spectroscopic Determination of Rotational Temperature in C2H4/C2H2/O2 Flames for Diamond Growth with and Without Tunable CO2 Laser Excitation.

Resonant Excitation of Ethylene Molecules in the Combustion Flame CVD of Diamond Using a Wavelength Tunable CO 2 Laser

Characterization of diamond thin films deposited by a CO2 laser-assisted combustion-flame method

In-situ Monitoring of PCVD Diamond Films Growth by Langmuir Probe and Optical Emission Spectroscopy

Research of the Growth and Nucleation Mechanisms of Diamond Film by Optical Emission Spectra and Raman Spectra

Fast Growth of Diamond Crystals in Open Air by Combustion Synthesis with Resonant Laser Energy Coupling

Diagnostics of Plasma Emission Spectra During Electron Assisted Chemical Vapor Deposition of Diamond Films

Analysis Of Optical Emission Spectroscopy In Diamond Chemical Vapor Deposition

Enhanced Chemical Vapor Deposition of Diamond by Wavelength-Matched Vibrational Excitations of Ethylene Molecules Using Tunable CO2 Laser Irradiation

Laser-Assisted Synthesis of Diamond Crystals in Open Air Through Vibrational Excitation of Precursor Molecules

Optical Spectroscopy Diagnosis of Methane Plasma Generated with Atmospheric Pressure Jet

[Optical Spectroscopy for High-Pressure Microwave Plasma Chemical Vapor Deposition of Diamond Films]

Phase diagram for diamond growth in atmospheric oxyacetylene flames

Thermodynamics Analyses of the Effect of CH 3 and C 2 H 2 on Morphology of CVD Diamond Films

Excitations of Precursor Molecules by Different Laser Powers in Laser-Assisted Growth of Diamond Films

Laser-power-resolved Excitations of Ethylene Molecules in Laser-Assisted Synthesis of Diamond Films

The Effect of Co2 on the High-Rate Homoepitaxial Growth of Cvd Single Crystal Diamonds

Insitu Observations Of Optical-Emission Spectra In The Diamond Deposition Environment Of Arc-Discharge Plasma Chemical Vapor-Deposition

Effect of CN and CH radicals on diamond and carbon nanotubes growth in MECVD

Co2 Gas Resonance Absorption at Co2 Laser Wavelength in Multiple Laser Coating