Photoluminescence from Strained SiGe/Si Quantum Well Structures Grown by Si Molecular Beam Epitaxy

Y YANG,XK LU,D HUANG,XJ CHEN,Z JIANG,M YANG,Y FAN,D GONG,G ZHAO,X WANG
DOI: https://doi.org/10.1117/12.190791
1994-01-01
Abstract:We reported deep-level-free band edge luminescence from strained SiGe/Si multiple quantum well structures grown by conventional solid source Si MBE. No-phonon (NP) transitions due to symmetry-breaking alloy disordering in SiGe layers and transverse optical (TO) phonon replicas were clearly identified. A high quality of crystallinity is essential to the efficient luminescence. The choice of a higher growth temperature, Ts equals 870 degree(s)C, beyond the conventional growth temperature window 400-600 degree(s)C, was found to be important for radioactive recombination in SiGe/Si QWs structures.
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