Effect of Content Ratio on Solution-Processed High-K Titanium-Aluminum Oxide Dielectric Films

Haifeng Pu,Honglei Li,Zhao Yang,Qianfei Zhou,Chengyuan Dong,Qun Zhang
DOI: https://doi.org/10.1149/2.007310ssl
2013-01-01
ECS Solid State Letters
Abstract:In this paper, a solution-processing method for fabrication of the titanium-aluminum oxide (TAO) was proposed. Variation of band gap, permittivity, and leakage current density and permittivity of TAO films with different Ti content were investigated. The permittivity and leakage current density of TAO films were proportion to the Ti content, while the bandgap did the reverse. A remarkable enhancement in permittivity (16.5) could be achieved at Ti:Al=0.4:0.6, meanwhile the leakage current density was similar to 4 x 10(-7) A/cm(2) at 2 MV/cm. (c) 2013 The Electrochemical Society. All rights reserved.
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