Abstract:Microelectromechanical systems (MEMS) are the instruments of choice for high-precision manipulation and sensing processes at the microscale. They are, therefore, a subject of interest in many leading industrial and academic research sectors owing to their superior potential in applications requiring extreme precision, as well as in their use as a scalable device. Certain applications tend to require a MEMS device to function with low operational temperatures, as well as within fully immersed conditions in various media and with different flow parameters. This study made use of a V-shaped electrothermal actuator to demonstrate a novel, state-of-the-art numerical methodology with a two-way coupled analysis. This methodology included the effects of fluid-structure interaction between the MEMS device and its surrounding fluid and may be used by MEMS design engineers and analysts at the design stages of their devices for a more robust product. Throughout this study, a thermal-electric finite element model was strongly coupled to a finite volume model to incorporate the spatially varying cooling effects of the surrounding fluid (still air) onto the V-shaped electrothermal device during steady-state operation. The methodology was compared to already established and accepted analysis methods for MEMS electrothermal actuators in still air. The maximum device temperatures for input voltages ranging from 0 V to 10 V were assessed. During the postprocessing routine of the two-way electrothermal actuator coupled analysis, a spatially-varying heat transfer coefficient was evident, the magnitude of which was orders of magnitude larger than what is typically applied to macro-objects operating in similar environmental conditions. The latter phenomenon was correlated with similar findings in the literature.

Reduced Order Thermal Modeling of a One-Dimensional Electrothermally Actuated Micromirror Device

Macromodeling of the electrostatically actuated circular plate based on mode superposition method

Macromodeling of Electrostatically Actuated Circular Plate Based on mode analysis

Macromodeling Of The Electrostatically Actuated Rectangle Plate Based On Modal Projection

One-Dimensional Thermal Analysis of the Flexible Electronic Devices Integrated with Human Skin.

Theoretical Modeling of Microscopic Photothermal Expansion and Experimental Study of Photothermal Microactuators

Theoretical modeling and experimental investigation of in-phase resonant MEMS mirrors with cascaded structures

Modeling and Analysis of A Mems-Based Thermal Emissivity Variable Thermal Control Device

Reduced Order Modeling for Thermal Simulations of Electric Components With Surface-to-Surface Radiation

Theoretical Modelling and Experimental Study of Novel Photothermal Microactuators

Development of a reduced-order AROMM model for the nonlinear thermal simulation of electronic components

A Large-Scan-Range Electrothermal Micromirror Integrated with Thermal Convection-Based Position Sensors

Analysis and experimentation of novel asymmetric photo-thermal micro-actuator

Thermomechanical Modeling of Scanning Joule Expansion Microscopy Imaging of Single-Walled Carbon Nanotube Devices

Ion Write Microthermotics: Programing Thermal Metamaterials at the Microscale

Reduced-Order Modelling of the Bending of an Array of Torsional Micromirrors

Coupled Finite Element-Finite Volume Multi-Physics Analysis of MEMS Electrothermal Actuators

Modeling and closed loop control of a polymer composite-based hard-magnetic micromirror for optical switching applications

Dynamic Modeling of a MEMS Electro-Thermal Actuator Considering Micro-Scale Heat Transfer With End Effectors

Distributed Microscopic Actuation Analysis of Deformable Plate Membrane Mirrors

A reduced-order modeling for thermo-mechanical coupling analyses by using radial integration boundary element method