Reduced-Order Modelling of the Bending of an Array of Torsional Micromirrors

A. Molfese,A. Nannini,F. Pieri
DOI: https://doi.org/10.48550/arXiv.0711.3330
2007-11-21
Other Computer Science
Abstract:Reduced-Order Modelling of the Bending of an Array of An array of micromirrors for beam steering optical switching has been designed in a thick polysilicon technology. A novel semi-analytical method to calculate the static characteristics of the micromirrors by taking into account the flexural deformation of the structure is presented. The results are compared with 3D coupled-field FEM simulation.
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