Abstract:Heteroepitaxial thin films are subjected to very large stresses, typically in the giga-Pascal range, due to lattice mismatch. Their applications in microelectronic devices have drawn a growing research effort which involves, in part, a better understanding of the processes by which defects such as cracks and dislocations are nucleated in a thin layer structure. One of the possible defect mechanisms is related to a stress-induced morphological instability which tends to roughen the film surface by mass diffusion during film growth or annealing. A major objective of this paper is to show that a few invariance properties of the strain energy density and the chemical potential in a heteroepitaxial structure can be utilized to obtain some valuable information concerning the equilibrium profile, the stress concentration and the formation of cusp-like stress singularities without having to resort to full-scale numerical studies. The process of cusp-formation requires a critical film thickness Hcr which is independent of the Matthews critical thickness herfor misfit dislocation formation by propagation of threading dislocations within the film. Calculations show that Hcr is significantly larger than hcr for a wide range of misfit strain, suggesting that nucleation of threading dislocations via cusp-formation could be critical in the overall process of strain relaxation in this type of film. Finally, a “phase” diagram is constructed to categorize important consequences of the surface evolution based on the instability wavelength and average film thickness.

Numerical Simulation of Diffusion Controlled Surface Evolution

A Numerical Study of Stress Controlled Surface Diffusion During Epitaxial Film Growth

Spatially Configuring Wrinkle Pattern and Multiscale Surface Evolution with Structural Confinement

Computer Simulations of the Stranski–Krastanov Growth of Heteroepitaxial Films with Elastic Anisotropy

Continuum Modeling of Surface Roughening in Heteroepitaxial Structures Based on Phase Field Theory

Sustained Surface Wave Propagation Induced by Surface Diffusion Driven by Strain Relaxation in A Heteroepitaxial Film

Some general properties of stress-driven surface evolution in a heteroepitaxial thin film structure

Computer Simulation of Quantum Dot Surface under Stress

Nonlinear Evolution Equation for the Stress-Driven Morphological Instability

Dynamics of Terraces on a Silicon Surface Due to the Combined Action of Strain and Electric Current

A continuum description of the energetics and evolution of stepped surfaces in strained nanostructures

Nonlinear evolution of a morphological instability in a strained epitaxial film

Monte-Carlo Simulation of Crystal Growth with Diffusion Employing an Anisotropic Model

Coarsening Kinetics of Heteroepitaxial Islands in Nucleationless Stranski-Krastanov Growth

Nonlinear effects for island coarsening and stabilization during strained film heteroepitaxy

How to model surface diffusion using the phase-field approach

Application of Onsager's variational principle to the dynamics of a solid toroidal island on a substrate

Morphological Evolution of Inhomogeneities Due to Diffusion and Epitaxy

A Multilayered Circular Inhomogeneity with Interfacial Diffusion and Sliding

Strain-Mediated Patterning of Surface Nanostructure by the Subsurface Island Array

A Simulation of Dispersion of Solid on Carrier Surface