Abstract:A mechanistic understanding of interactions be-tween atomically thin two-dimensional (2D) transition-metal dichalcogenides (TMDs) and their growth substrates is important for achieving the unidirectional alignment of nuclei and seamless stitching of 2D TMD domains and thus 2D wafers. In this work, we conduct a cross-sectional scanning transmission electron microscopy (STEM) study to investigate the atomic-scale nucleation and early stage growth behaviors of chemical vapor deposited monolayer (ML-) MoS2 and molecular beam epitaxy ML-MoSe2 on a Au(111) substrate. Statistical analysis reveals the majority of as-grown domains, i.e., similar to 88% for MoS2 and 90% for MoSe2, nucleate on surface terraces, with the rest (i.e., similar to 12% for MoS2 and 10% for MoSe2) on surface steps. Moreover, within the latter case, step-associated nucleation, similar to 64% of them are terminated with a Mo-zigzag edge in connection with the Au surface steps, with the rest (similar to 36%) being S-zigzag edges. In conjunction with ab initio density functional theory calculations, the results confirm that van der Waals epitaxy, rather than the surface step guided epitaxy, plays deterministic roles for the realization of unidirectional ML-MoS2 (MoSe2) domains on a Au(111) substrate. In contrast, surface steps, particularly their step height, are mainly responsible for the integrity and thickness of MoS2/MoSe2 films. In detail, it is found that the lateral growth of monolayer thick MoS2/MoSe2 domains only proceeds across mono-Au-atom high surface steps (similar to 2.4 angstrom), but fail for higher ones (bi-Au atom step and higher) during the growth. Our cross-sectional STEM study also confirms the existence of considerable compressive residual strain that reaches similar to 3.0% for ML-MoS2/MoSe2 domains on Au(111). The present study aims to understand the growth mechanism of 2D TMD wafers.

Growth Instability of 2D Materials on Non-Euclidean Surfaces

Stress-dominated growth of two-dimensional materials on nonplanar substrates

Spatially Configuring Wrinkle Pattern and Multiscale Surface Evolution with Structural Confinement

Atomistic Insight into the Epitaxial Growth Mechanism of Single-Crystal Two-Dimensional Transition-Metal Dichalcogenides on Au(111) Substrate

Geometrical Incompatibility Regulated Pattern Selection and Morphological Evolution in Growing Spherical Soft Tissues

Growth of Curved Crystals: Competition Between Topological Defect Nucleation and Boundary Branching.

The Coalescence Behavior of Two-Dimensional Materials Revealed by Multiscale in Situ Imaging During Chemical Vapor Deposition Growth.

Curvature geometry in 2D materials

Uncovering liquid-substrate fluctuation effects on crystal growth and disordered hyperuniformity of two-dimensional materials

The epitaxy of 2D materials growth

A three-dimensional phase diagram of growth-induced surface instabilities

Dislocation Driven Spiral and Non-Spiral Growth in Layered Chalcogenides.

Lattice Mismatch Induced Nonlinear Growth of Graphene.

Instability types at ion-assisted alloy deposition: from two-dimensional to three-dimensional nanopattern growth

Inelastic Surface Growth

Growth of Single Crystalline 2D Materials beyond Graphene on Non‐metallic Substrates

Crystallization dynamics on curved surfaces

Progress and Perspective on the Growth of Two-Dimensional Single Crystals.

Spontaneous curvature in two-dimensional van der Waals heterostructures

Numerical Simulation of Diffusion Controlled Surface Evolution

Morphological Evolution of Inhomogeneities Due to Diffusion and Epitaxy