Abstract:In this paper,the design optimization and experimental demonstration of single-drive push-pull silicon electro-optic modulators are presented. In order to improve the modulation efficiency and lower the optical propagation loss,the PN junction profile and doping concentrations are firstly optimized. Next,the impedance match,phase match and microwave loss are studied,and in particular,the influence of low-doping slab width,travelling-wave electrode (TWE) width and spacing on the modulator performance are analyzed. Following the comprehensive theoretical analysis and numerical simulation,the modulator performance measurements,including the optical transmission spectrum upon single-drive push-pull tuning,small-signal microwave signal response,and high-speed digital signal modulation are consequently carried out. The on-chip insertion loss of the modulators is around 7-9 dB and the half-wave voltage is 5 V. At a bias voltage of 0 V,the optimized modulator has a modulation bandwidth of >18 GHz. The microwave reflectivity at the entrance of the TWE is less than -20 dB,suggesting good impedance match. When the reverse bias voltage is increased to 4 V,the modulation bandwidth can exceed 30 GHz,allowing for realization of 56 Gbit/s on-off keying (OOK) and 40 Gbit/s binary phase-shift keying (BPSK) modulations.

Optimized Silicon Mzi Modulators for 50 Gbit/S Ook and 40 Gbit/S Bpsk Modulation

Single-drive Push-Pull Silicon Mach-Zehnder Modulator for OOK and BPSK Modulation

60 Gbit/s Silicon Modulators with Enhanced Electro-Optical Efficiency

Silicon High-Speed BPSK Modulator: Design and Optimization

High-speed, low-loss silicon Mach-Zehnder modulators with doping optimization.

High-Baudrate Silicon Photonics Ring Resonator and Mach-Zehnder Modulators for Short-Reach Applications

Design Optimization and Implementation of Silicon Mach-Zehnder Electro-Optic Modulators

50 Gb/s Silicon QPSK Modulator with Single-Drive Push-Pull Traveling Wave Electrodes Design

32-Gb/s OOK and 64-Gb/s PAM-4 Modulation Using a Single-Drive Silicon Mach–Zehnder Modulator with 2 V Drive Voltage

32-Gb/s OOK and 64-Gb/s PAM-4 Modulation Using a Single-Drive Silicon Mach–Zehnder Modulator with 2 V Drive Voltage

64 Gb/s silicon QPSK modulator with single-drive push-pull traveling wave electrodes

Compact and power-efficient silicon modulators Beyond 60 Gbit/s

Highly Efficient Silicon Michelson Interferometer Modulators

Simulation and Experimental Results of Single Drive Silicon Mach-Zehnder Modulator

Modeling and optimization of a single-drive push–pull silicon Mach–Zehnder modulator

Optimized Silicon Qpsk Modulator with 64-Gb/s Modulation Speed

25Gbit/s Fully Cmos-Compatible Silicon Modulator Based on Interleaved Pn Junctions

High speed silicon Mach-Zehnder modulator based on interleaved PN junctions.

Silicon high-speed binary phase-shift keying modulator with a single-drive push–pull high-speed traveling wave electrode

Improved Extinction Ratio of Mach-Zehnder Based Optical Modulators on CMOS Platform

Low-voltage, high speed, compact silicon modulator for BPSK modulation.

Optimized Silicon Mzi Modulators for 50 Gbit/S Ook and 40 Gbit/S Bpsk Modulation

Single-drive Push-Pull Silicon Mach-Zehnder Modulator for OOK and BPSK Modulation

60 Gbit/s Silicon Modulators with Enhanced Electro-Optical Efficiency

Silicon High-Speed BPSK Modulator: Design and Optimization

High-speed, low-loss silicon Mach-Zehnder modulators with doping optimization.

High-Baudrate Silicon Photonics Ring Resonator and Mach-Zehnder Modulators for Short-Reach Applications

Design Optimization and Implementation of Silicon Mach-Zehnder Electro-Optic Modulators

50 Gb/s Silicon QPSK Modulator with Single-Drive Push-Pull Traveling Wave Electrodes Design

32-Gb&#x002F;s OOK and 64-Gb&#x002F;s PAM-4 Modulation Using a Single-Drive Silicon Mach&#x2013;Zehnder Modulator with 2 V Drive Voltage

32-Gb/s OOK and 64-Gb/s PAM-4 Modulation Using a Single-Drive Silicon Mach–Zehnder Modulator with 2 V Drive Voltage

64 Gb/s silicon QPSK modulator with single-drive push-pull traveling wave electrodes

Compact and power-efficient silicon modulators Beyond 60 Gbit/s

Highly Efficient Silicon Michelson Interferometer Modulators

Simulation and Experimental Results of Single Drive Silicon Mach-Zehnder Modulator

Modeling and optimization of a single-drive push–pull silicon Mach–Zehnder modulator

Optimized Silicon Qpsk Modulator with 64-Gb/s Modulation Speed

25Gbit/s Fully Cmos-Compatible Silicon Modulator Based on Interleaved Pn Junctions

High speed silicon Mach-Zehnder modulator based on interleaved PN junctions.

Silicon high-speed binary phase-shift keying modulator with a single-drive push–pull high-speed traveling wave electrode

Improved Extinction Ratio of Mach-Zehnder Based Optical Modulators on CMOS Platform

Low-voltage, high speed, compact silicon modulator for BPSK modulation.

32-Gb/s OOK and 64-Gb/s PAM-4 Modulation Using a Single-Drive Silicon Mach–Zehnder Modulator with 2 V Drive Voltage