Visible Photoluminescent Ge Nanocrystals Embedded In A-Sinx Films

Xx Qu,Xf Huang,Kj Chen,Zf Li,D Feng
DOI: https://doi.org/10.1117/12.190814
1994-01-01
Abstract:Ge nanocrystals embedded in a-SiNx matrix were prepared by the PECVD method with SiH4, GeH4 and NH3 mixed in H2 plasma and followed the thermal-annealing treatment, which was based on the preferential chemical bonding formation of Si-N and Ge-Ge. The samples were characterized by infrared absorption, X-ray diffraction, Raman scattering spectra and TEM micrograph. Visible photoluminescence was observed at room temperature with the PL peak at about 560 nm and the linewidth about 0.45 eV. We are temporarily using the quantum confinement model to explain the PL mechanism.
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