Large Working Area F-Theta Lens

yiqun ji,weimin shen,jianjun yu
DOI: https://doi.org/10.1117/12.668160
2006-01-01
Abstract:F-Theta lens is different from common photo lenses, and it is usually used in the scanning system to realize linear scanning by means of its linearity. The lens focuses a laser beam and its scanning quality mainly depends on its focusing performance. When the F-Theta lenses used in laser marking systems, as we know, their working area is generally not larger than 300x300mm(2) interiorly. In this paper, the design of a kind of F-Theta lens, which has the working area as large as 680mm in diameter, is introduced in detail. Firstly, the first-order optical parameters are determined by its paraxial analysis, flat-field condition, and aberration characteristics. Secondly, the initial structure parameters of the F-Theta lens are obtained through the PW method. And then the optimal F-Theta lens meeting with its required optical performances is gained with some optical design software under practical constrained conditions. The designed system is compact and composed of only four spherical lenses made up of two kinds of common optical glass. Its tube length from the front surface of the first lens to the back surface of the last one is less than 100mm. But the focusing performance of the lens is within diffraction limit on the whole and its distortion relative to the F-Theta linear relation is less than 0.5 percent.
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