Abstract:Ultra-short pulse laser interaction with diamond materials has attracted extensive interest in micro- and nano-machining, especially for the fabrication of micro tools, because of the straightforward method and high precision. Thanks to the development of chemical vapor deposition (CVD) technology, high-quality CVD diamonds are employed in more varieties of tools as performance-enhancing coatings. The purpose of the experiments reported here was to explore the machinability of CVD diamond coating under the irradiation of femtosecond (fs) pulsed laser. The factor-control approach was adopted to investigate the influence of scanning speed, single pulse energy and repetition rate on the surface quality and carbon phase transition of CVD diamond coating. The material removal rate and surface roughness were evaluated. The interaction mechanism of scanning speed, single pulse energy, and repetition rate were discussed, and the fs laser ablation threshold of CVD diamond coating was calculated. It was demonstrated that two ablation mechanisms (weak and intensive) were in existence as evidenced by the distinct surface morphologies induced under different processing conditions. A strong dependence on the variation of scanning speed and pulse energy is identified in the examination of surface roughness and removal rate. Lorentzian–Gaussian deconvolution of Raman spectra illustrates that fs laser irradiation yields a strong modification effect on the coating and release the compressive stress in it. Furthermore, a newly defined parameter referring to the fs laser energies applied to unit volume was introduced to depict the degree of ablation and the Taguchi method was used to figure out the significance of different parameters. The ablation threshold of CVD diamond coating at the effective pulses of 90 is calculated to be 0.138 J/cm2.

Nano Spiral Stripes Formation on Diamond Surface Employing a High Repetition Rate Femtosecond Laser

Study on Femtosecond Laser Processing Characteristics of Nano-Crystalline CVD Diamond Coating

Analysis of Femtosecond Laser Surface Patterning on Bulk Single-Crystalline Diamond

Sub-Diffraction Limited Nanogroove Fabrication of 30 Nm Features on Diamond Films Using 800 Nm Femtosecond Laser Irradiation

Diamond Optical Vortex Generator Processed by Ultraviolet Femtosecond Laser.

Seed-Free Growth of Diamond Patterns on Femtosecond Laser Processed Silicon Substrates

Laser-induced self-organized periodic nano-hole/nano-ridge structures on the surface of silicon produced with a tightly focused femtosecond pulse laser beam

Femtosecond Laser Induced Tunable Surface Transformations on (111) Si Aided by Square Grids Diffraction

Laser Machining Micro-Structures on Diamond Surface with a Sub-Nanosecond Pulsed Laser

Surface microstructuring of single crystalline diamond based on the accumulated energy homogenization in the nanosecond pulsed laser ablation

Periodic nanohole array structure induced on a silicon surface by direct writing with a femtosecond laser

Fabrication of Nanostructures on Silicon Carbide Surface and Microgroove Sidewall Using 800-Nm Femtosecond Laser

Sub-wavelength Ripple Formation on Silicon Induced by Femtosecond Laser Radiation

Formation and Evolution of Micro/Nano Periodic Ripples on 2205 Stainless Steel Machined by Femtosecond Laser

Femtosecond Laser-Induced Periodic Surface Structure on Diamond Film

Sub-surface Layer of Silicon Singe Crystal Periodically Nanostructured by Near-infrared Femtosecond Laser Pulses

Understanding femtosecond laser internal scribing of diamond by atomic simulation: Phase transition, structure and property

Nano-ablation of Silica by Plasmonic Surface Wave at Low Fluence.

Evolution of nano-ripples on stainless steel irradiated by picosecond laser pulses

Experimental Parametric Investigation of Nanosecond Laser-Induced Surface Graphitization of Nano-Crystalline Diamond

Periodic Surface Structures Induced by Femtosecond Laser Single Pulse and Pulse Trains on Metals