Investigation on Gaas Surface Treated with Dimethylaluminumhydride

Hong-Liang Lu,Xiao-Liang Wang,Masakazu Sugiyama,Yukihiro Shimogaki
DOI: https://doi.org/10.1063/1.3268450
IF: 4
2009-01-01
Applied Physics Letters
Abstract:The reduction and removal of surface native oxides from as-degreased and HCl-treated GaAs substrates using dimethylaluminumhydride (DMAH) have been studied by x-ray photoelectron spectroscopy. It is revealed that higher oxide states are more easily removed from the GaAs surface after exposure to DMAH at 300 °C. Complete consumption of native oxides on HCl-treated GaAs surface has been realized with 10 s DMAH exposure. In addition, the metallization of the Al–O bonding with increase of DMAH exposure confirms the reduction of native oxides on GaAs.
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