Selective Area Oxide Desorption by Electron Irradiation in a H2 Ambient on GaAs (100)

SJ Brown,TM Burke,MP Smith,DA Ritchie,M Pepper,KBT Tang,RE Palmer
DOI: https://doi.org/10.1063/1.123419
IF: 4
1999-01-01
Applied Physics Letters
Abstract:The selective area removal of oxides from the surface of exposed GaAs (100) has been achieved by irradiating the sample with a broad, low energy electron beam in a H2 ambient. It is proposed that electrons dissociate the molecular hydrogen to create ionized species which react with the surface. The surfaces of samples decontaminated at 365 °C, up to electron energies of 200 eV, were undamaged as revealed by atomic force microscopy. Moreover, quantum well structures epitaxially grown on these surfaces exhibited luminescence. A possible reaction mechanism responsible for the oxide removal is described.
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