Molecular-Beam Studies On The Laser-Enhanced Surface-Reaction Of Gaas(100) With Chlorine

qizong qin,kangzhan zhang,pinghe lu,qike zheng

DOI: https://doi.org/10.1002/jccs.199500055

1995-01-01

Journal of the Chinese Chemical Society

Abstract:A cw supersonic Cl-2 molecular beam coupled with an angle-resolved time-of-flight (TOF) technique has been used to investigate the laser-enhanced surface reaction of GaAs(100) with chlorine. The mass and velocity distributions of the major reaction products under 1064 nm laser irradiation have been measured as a function of laser fluence, detection angle, surface temperature and normal component of the translational energy of the incident chlorine molecules. It has been found that increasing both laser fluence and the translational energy of incident chlorine molecules markedly enhance this surface reaction. The measured flux angular distributions of major reaction products can be fit satisfactorily with a bi-cosine function. Measurements of the mass and angular distributions of reaction products by a modulated molecular beam mass spectrometry show that the surface temperature effect is obvious for the Cl-2/GaAs(100) ''dark'' thermal reaction. A direct activated dissociative chemisorption is proposed for the mechanism of Cl-2 chemisorption on the GaAs(100) surface.