Abstract:Angle-resolved supersonic molecular beam scattering techniques are used to examine the angular distributions of the products formed in the thermal and UV laser-induced reactions of chlorine molecular beam with InP(100) surface. For the thermal reaction, the angular distributions of InCl2+, InCl+, PCl+, PCl2+ and P-4(+) products are slightly peaked towards the normal of the surface and vary as cos(1.5)theta, theta being the detection angle from the surface normal. The effect of the normal components of the translational energies of Cl-2 molecules is also observed at different angle of incidence. Under 355 nm pulsed laser irradiation, the time-of-flight (TOF) spectra of InCl= are measured as a function of the detection angle and Maxwellian characterized with the mean kinetic energy or translational temperature. The flux distributions are sharper than cosine law and can be fitted by an expression of F(theta) = a . cos theta + (1-a)cos(n)theta, where a and n are adjustable parameters. The mean kinetic energy distribution of InCl molecules is strongly peaked around the surface normal and decreases with increasing the detection angle. These results imply that both thermal and nonthermal desorption mechanisms are important in the UV laser-induced reaction processes.

SUPERSONIC MOLECULAR BEAM STUDIES ON THE DYNAMICS OF LASER-INDUCED Cl-2-Ta SURFACE-REACTIONS

DYNAMICS OF LASER-INDUCED REACTIONS OF CL2 MOLECULAR-BEAM WITH A TITANIUM SURFACE

Molecular-Beam Studies on the Laser-Enhanced Reaction of Chlorine with A Copper Surface at 1064 Nm

Molecular-Beam Studies On The Laser-Enhanced Surface-Reaction Of Gaas(100) With Chlorine

Angle-Resolved Time-Of-Flight Studies of Laser-Assisted Chemical Etching Reactions

Laser-enhanced Gas Surface Reaction of Chlorine with Aluminum Polycrystalline Surface

Angular Distribution Studies on the Reactive Scattering of Cl-2 Molecular Beam with Inp(100) Surface

Laser Induced Gas-Surface Reaction Of Cl-2 Supersonic Molecular Beam With A Nickel Surface

A KINETIC-STUDY OF CHEMICAL ETCHING OF GAAS(100) SURFACE USING ANGLE-RESOLVED TOF METHOD

KINETICS OF LASER-INDUCED REACTION OF GE(111) WITH CL-2 UNDER LASER IRRADIATION AT 1064 NM

An Optical Emission Spectroscopic Study on Visible Laser Ablation of Ta2O5 in Ambient O2

Laser-Induced Reactions of Semiconductor Surfaces

Enhancement Effect of Translational Energy on Laser Induced Gas-Surface Etching Reactions

Laser-Induced Desorption and Photofragmentation of Small Molecules Adsorbed on Surfaces

Molecular-Beam Study of Laser-Induced Chemical Etching of Si(111) by Chlorine Molecules

Effect of translational energy on laser-assisted reaction of GaAs with chlorine

An Angle-Resolved Time-of-flight Mass Spectrometric Study of Pulsed Laser Ablated Ta2O5

Optical emission and time-of-flight mass spectroscopic studies of laser ablated metal chlorides

Time-of-flight mass spectrometric study on UV laser ablation of silver chloride

Chemical reactions of laser ablated Ti atom with halomethanes in gas phase

Spectroscopic and Theoretical Studies on the Reactions of Laser-Ablated Tantalum with Carbon Dioxide