An Optical Emission Spectroscopic Study on Visible Laser Ablation of Ta2O5 in Ambient O2

MF Zhou,ZW Fu,QZ Qin
DOI: https://doi.org/10.1016/s0169-4332(97)00377-2
IF: 6.7
1998-01-01
Applied Surface Science
Abstract:The composition and evolution of the plume generated by 532 nm laser ablation of a Ta2O5 target in ambient O2 has been studied by optical emission spectroscopy. Ionic and neutral atomic Ta as well as TaO molecules are observed in the plume. Two components of TaO emission are observed by spatially and temporally resolved emission spectroscopy. The delay time and intensity of TaO emission are measured as a function of laser fluence, distance from the target surface and ambient O2 pressure. The results suggest that the interaction between the laser radiation and the target as well as the reactions of the ablated species with oxygen play an important role in the growth of the Ta2O5 film.
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