Abstract:The propagation of KrF excimer laser-produced plasmas from Pb(Zr0.52Ti0.48)O-3 has been studied with emphasis on topics relevant to the interaction of a plume with ambient gas in oxide film growth by pulsed laser deposition. A gated CCD was employed to investigate the overall shape and propagation of the laser plasma in different background gases. It is found that the plume image in both 20 Pa O-2 and Ar is spherical. With increasing O-2 pressure to 60 Pa, the plumes are prolonged along the target normal direction and suppressed in the direction parallel to the target surface. Above 60 Pa, the plumes are suppressed along both directions. When the ambient gas is Ar, the changes of the plumes are contradictious. The similarity of plume shape in 20 Pa O-2 and Ar has been interpreted as that the interaction of ablated species with ambient gas is mainly elastic. The differences are thought to be due to the interaction of ablated species with ambient gas, which is reactive in O-2 and elastic in Ar. It was proposed that the elastic scattering of ablated species by background gas leads to the nonstoichiometry of the deposited film, while the reactive collision of ablated species with ambient gas is favorable to reduce the nonstoichiometry and to enhance the oxygen incorporation in the film. It was proposed that the propagation of the ablated species can be divided into three regimes.

Spectroscopic Characterization of Laser-Ablated Plume from A La-Ca-Mn-O Target in an O-2 Ambient

Characterization of laser ablated species from a La–Ca–Mn–O target by angle- and time-resolved mass spectrometry

An Optical Emission Spectroscopic Study on Visible Laser Ablation of Ta2O5 in Ambient O2

Angle- and Time-Resolved Mass Spectrometric Study on Pulsed Laser Ablation of an La-Ca-Mn-O Target

Velocity Distributions of Laser Ablated Species from a La0.67Ca0.33MnO3 Target

A Time-Resolved Quadrupole Mass Spectrometric Study on 355 Nm Laser Ablated Species Ejected from LiMn 2 O 4

Optical Transient Absorption Spectroscopy of LaO Produced by Pulsed Laser Ablation of La2O3

Temporal and Spatial TaO Emission Generated from UV Laser Ablation of Ta and Ta2O5 in Oxygen Ambient

Mass, velocity and angular distributions of the species ejected from laser ablation of LiCoO2

An Angle-Resolved Time-of-flight Mass Spectrometric Study of Pulsed Laser Ablated Ta2O5

A thermal-controlling mechanism for laser ablation of a colossal magnetoresistant oxide target

Angular Distribution Of Laser-Ablated Species From A Pr0.67sr0.33mno3 Target

AlO molecular spectral emission enhanced by delayed double-pulse laser ablation of aluminum target in air

Optical emission and time-of-flight mass spectroscopic studies of laser ablated metal chlorides

The Interaction of Ambient Background Gas with a Plume Formed in Pulsed Laser Deposition

A study of pulsed laser deposition of LiMn2O4 thin films

A Mass Spectrometric Study on the Formation of Ionic Ta-containing Oxides from Laser Ablation of Ta and Ta2O5 in O2 Ambient

A Study of Dynamics and Chemical Reactions in Laser-Ablated PbTiO3 Plume by Optical-Wavelength-sensitive CCD Photography

A study of pulsed laser deposition of LiMn 2O 4 thin films

On Analysis of Laser Plasma Aluminum Monoxide Emission Spectra

Spatiotemporal characterization of cerium monoxide in laser ablation plasmas using spectrally-resolved fast-gated imaging