A Mass Spectrometric Study on the Formation of Ionic Ta-containing Oxides from Laser Ablation of Ta and Ta2O5 in O2 Ambient

Xuefeng Wang,Zhonghua Gu,Qi‐Zong Qin
DOI: https://doi.org/10.1016/s1387-3806(99)00034-2
IF: 1.934
1999-01-01
International Journal of Mass Spectrometry
Abstract:Formation of the ionic Ta-containing oxides in 532 nm laser ablation of Ta and Ta2O5 in an ambient O2 is investigated using a time-of-flight mass spectrometry. Mass spectra are taken both in vacuum and in an oxygen ambient. Results of the detected positive charged species show that besides the TaO+ and TaO2+ ions, the new species such as (O2)TaO+ and (O2)Ta(O2)+ are observed for the first time. The molecular geometries of the Ta-containing ionic oxides are predicted. Along with the theoretically calculated energy changes of possible oxidation reactions involved, the reaction channels for the formation of the ionic Ta-containing oxides are discussed.
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