KINETICS OF LASER-INDUCED REACTION OF GE(111) WITH CL-2 UNDER LASER IRRADIATION AT 1064 NM

KZ ZHANG,QZ QIN

1995-01-01

Abstract:Laser-induced gas-surface reaction of Ge(lll) surface with chlorine is investigated by a CW supersonic molecular beam under a pulsed laser irradiation at 1064 nm. A major desorbed reaction product GeCl2 is determined at different surface temperatures by a time-resolved mass spectrometry. The reaction yield of GeCl2 increases obviously with increasing the translational energy of the incident chlorine molecules, laser fluence and surface temperature. But the translational temperature of GeCl2 measured by time-of-flight spectra are independent of incident Cl-2 tanslational energy and laser fluence. A possible reaction mechanism for the laser-induced reaction of Ge(lll) with Cl-2 at 1064 nm mainly consists of the dissociative chemisorption of Cl-2 on the surface, the reaction of absorbed Cl with Ge atoms and the laser-induced thermal desorption.