Conduction Band Offset at Geo2/Ge Interface Determined by Internal Photoemission and Charge-Corrected X-Ray Photoelectron Spectroscopies

W. F. Zhang,T. Nishimula,K. Nagashio,K. Kita,A. Toriumi
DOI: https://doi.org/10.1063/1.4794417
IF: 4
2013-01-01
Applied Physics Letters
Abstract:We report a consistent conduction band offset (CBO) at a GeO2/Ge interface determined by internal photoemission spectroscopy (IPE) and charge-corrected X-ray photoelectron spectroscopy (XPS). IPE results showed that the CBO value was larger than 1.5 eV irrespective of metal electrode and substrate type variance, while an accurate determination of valence band offset (VBO) by XPS requires a careful correction of differential charging phenomena. The VBO value was determined to be 3.60 ± 0.2 eV by XPS after charge correction, thus yielding a CBO (1.60 ± 0.2 eV) in excellent agreement with the IPE results. Such a large CBO (>1.5 eV) confirmed here is promising in terms of using GeO2 as a potential passivation layer for future Ge-based scaled CMOS devices.
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