Three Dimensional Multilayer Solenoid Microcoils Inside Silica Glass

Xiangwei Meng,Qing Yang,Feng Chen,Chao Shan,Keyin Liu,Yanyang Li,Hao Bian,Jinhai Si,Xun Hou
DOI: https://doi.org/10.1016/j.optlastec.2015.07.020
2016-01-01
Abstract:Three dimensional (3D) solenoid microcoils could generate uniform magnetic field. Multilayer solenoid microcoils are highly pursued for strong magnetic field and high inductance in advanced magnetic microsystems. However, the fabrication of the 3D multilayer solenoid microcoils is still a challenging task. In this paper, 3D multilayer solenoid microcoils with uniform diameters and high aspect ratio were fabricated in silica glass. An alloy (Bi/In/Sn/Pb) with high melting point was chosen as the conductive metal to overcome the limitation of working temperature and improve the electrical property. The inductance of the three layers microcoils was measured, and the value is 77.71nH at 100kHz and 17.39nH at 120MHz. The quality factor was calculated, and it has a value of 5.02 at 120MHz. This approach shows an improvement method to achieve complex 3D metal microstructures and electronic components, which could be widely integrated in advanced magnetic microsystems.
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