Pyroelectric Current Measurements on Pbzr0.2ti0.8o3 Epitaxial Layers

B. Bhatia,J. Karthik,T. Tong,David G. Cahill,L. W. Martin,W. P. King

DOI: https://doi.org/10.1063/1.4766271

IF: 2.877

2012-01-01

Journal of Applied Physics

Abstract:We report pyroelectric current measurements on 150 nm thick PbZr0.2Ti0.8O3 (PZT) epitaxial films using frequency-domain thermal measurements over the range 0.02 Hz–1.3 MHz. The measured pyroelectric currents are proportional to the rate of temperature change, from ∼10−5 A/m2 to ∼103 A/m2 over the range 10−2 to 106 K/s. The film temperature oscillation is controlled using either a hotplate, microfabricated heater, or modulated laser, and the pyroelectric current is measured from a microelectrode fabricated onto the film. The measured pyroelectric coefficient of the PZT films is nearly constant across the entire frequency range at ≈−200 μC/m2K.