INVESTIGATION ON Pb(Zr_(0.3)Ti_(0.7))O_3 PYROELECTRIC THIN FILM MATERIALS

CW Zhong,HB Wang,JG Peng,SR Zhang,WL Zhang
DOI: https://doi.org/10.3321/j.issn:1001-9014.2005.06.002
2005-01-01
Abstract:Lead zirconate titanate, thin films were successfully prepared on 5-inch TiOx/Pt/Ti/SiO2/Si substrates by RF-Magnetron Sputtering method. The experimental results show that the orientation of PZT thin films can be changed from. (111) to (100) by precisely controlling the substrate temperature. The (111)-oriented films with thickness of 500nm have the remanent polarization of 20 mu C/cm(2), dielectric constant of 370, dielectric loss of 1.5%, coercive field of 130kV/cm and pyroelectric coefficient of 1.1 x 10(-8)C/cm(2)K. The films can be used for fabricating uncooled infrared focal plane detector arrays.
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