Strain-Less Directed Self-Assembly of Si Nanocrystals on Patterned Sio2 Substrate

Jingjian Ren,Hao Hu,Feng Liu,Sheng Chu,Jianlin Liu
DOI: https://doi.org/10.1063/1.4749269
IF: 2.877
2012-01-01
Journal of Applied Physics
Abstract:Strain induced self-assembled Stranski-Krastanov growth of semiconductor islands on patterned substrate has shown great improvement of island size uniformity and spatial order. Here, we show self-assembled Volmer-Weber (V-W) growth of Si nanocrystals (NCs) on patterned SiO2 substrate via traditional chemical vapor deposition method under certain experimental configurations, induced by surface/interface energy competition without strain. A simplified two-dimensional theoretical model is developed to elucidate V-W island nucleation on the pattern substrate with varied morphologies, which shows good consistency with the experimental results. Our studies provide a general guidance for directing the growth and self-assembly of NCs on non-planar oxide substrates.
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