Study of Copper Diffusion into Polyimides by Optical Second-Harmonic Generation

JY ZHANG,YR SHEN,DS SOANE,D PAUSCHINGER
DOI: https://doi.org/10.1063/1.351037
IF: 2.877
1992-01-01
Journal of Applied Physics
Abstract:Optical second-harmonic generation is shown to be an effective means for in situ monitoring of two competing dynamic processes of Cu deposited on polyimide aggregation by surface diffusion and implantation by diffusion into the bulk. It is also explicitly demonstrated that a thin layer of Ti is able to completely block Cu diffusion into polyimide and promote the metal/polyimide.
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