Fabry–Perot Interferometer with Picometer Resolution Referenced to an Optical Frequency Comb

Minhao Zhu,Haoyun Wei,Xuejian Wu,Yan Li

DOI: https://doi.org/10.1016/j.optlaseng.2014.11.010

IF: 5.666

2014-01-01

Optics and Lasers in Engineering

Abstract:A picometer resolution Fabry-Perot (F-P) interferometer is proposed. The Pound-Drever-Hall locking scheme is employed to lock the frequency of a tracking external cavity diode laser (ECDL) to the resonance of a F-P cavity. The frequency change of ECDL induced by the probe mirror displacement is measured using an optical frequency comb (OFC). Therefore, the measurement result of the F-P interferometer is traceable to the radio frequency reference of the OFC. Experimentally, we demonstrate that the displacement resolution of 0.46 pm at 80 ms averaging time is achieved in our F-P interferometer and the uncertainty is 1.2 nm at the displacement of 1 pm. One application example of the F-P interferometer is presented to measure the hysteresis nonlinearity of the piezoelectric transducer attached to the probe mirror. The hysteresis nonlinearity observed is about 6% over the displacement of 700 nm. (C) 2014 Elsevier Ltd. All rights reserved.