Self‐assembled M ‐plane InGaN Quantum Dots: Formation and Shape Evolution

Xuelin Yang,Munetaka Arita,Satoshi Kako,Yasuhiko Arakawa
DOI: https://doi.org/10.1002/pssc.201100482
2012-01-01
Abstract:The authors report the formation and shape evolution of m-plane InGaN quantum dots grown on GaN substrates. The formation of the quantum dots is enabled by introducing AlGaN/AlN interlayers prior to the GaN layer. The introduced compressive strain in the GaN layer promotes a growth mode transition during layer growth, from smooth InGaN layer to three dimensional quantum dot structures. The structural transition is consistent with optical properties. Furthermore, we also discuss the shape evolution with different growth conditions and find that the InGaN quantum dots are elongated with decreasing the indium concentration. (C) 2012 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
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