Threshold Voltage Stability Enhancing Technology for p-GaN HEMTs Using Hybrid Gate Structure
Chi Zhang,Mingfei Li,Sheng Li,Siyang Liu,Denggui Wang,Weihao Lu,Yanfeng Ma,Mengli Liu,Jiaxing Wei,Long Zhang,Jianjun Zhou,Song Bai,Weifeng Sun
DOI: https://doi.org/10.1109/led.2022.3227252
IF: 4.8157
2022-01-01
IEEE Electron Device Letters
Abstract:A novel hybrid gate p-GaN power high-electron mobility transistor (Hyb-HEMT) technology is proposed in this work to effectively enhance threshold voltage (Vth) stability without significant gate leakage current (Igss) degradation. In this device concept, gate structure consists of spaced ohmic-type p-GaN metal dots and Schottky-type p-GaN metal. Charge storage effect can be alleviated through a free-carrier “discharge path” induced by ohmic-type p-GaN region, thus enhancing the Vth stability. The surrounding geometry distribution of Schottky-type p-GaN metal can take full advantage of depletion region, ensuring a relatively low Igss. It is experimentally demonstrated that hybrid gate structure can successfully suppress Vth shift within only 0.03V under 1200s DC drain/gate bias stress and the activation energy (EA) of proposed Hyb-HEMT is only 0.59eV, which indicates Hyb-HEMT owns shallower traps, leading to easier discharge of the induced stored charges. Meanwhile, experimental results and the mix-mode simulation prove that no carrier injection or trapping effect occurs in p-GaN layer after repetitive reverse freewheeling stress for the Hyb-HEMT device.
engineering, electrical & electronic