Ion-Implanted TiN Metal Gate with Dual Band-Edge Work Function and Excellent Reliability for Advanced CMOS Device Applications

Qiuxia Xu,Gaobo Xu,Huajie Zhou,Huilong Zhu,Qingqing Liang,Jinbiao Liu,Junfeng Li,Jinjuan Xiang,Miao Xu,Jian Zhong,Weijia Xu,Chao Zhao,Dapeng Chen,Tianchun Ye
DOI: https://doi.org/10.1109/ted.2015.2494080
2015-01-01
Abstract:This paper proposed, for the first time, that the dual band-edge effective work functions are achieved by employing a single metal gate (MG) and single high-k (HK) dielectric via ion implantation into a TiN MG for HP CMOS device applications under a gate-last process flow. The P/BF2 ion-implanted TiN/HfO2/ILSiO2 gate-stack does not degrade the gate leakage, reliability, and carrier mobility, and reduces the effective oxide thickness. The impact of P/BF2 ion implant energy, dose, and TiN gate thickness on the properties of implanted TiN/HfO2/ILSiO2 gate-stack is studied, and the corresponding possible mechanisms are discussed. This technique has been successfully applied to the replacement MG and HK/MG last process flow to fabricate HP CMOSFETs and CMOS 32 frequency dividers with a minimum gate length of 25 nm.
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