Two-Step Sintering of Aluminum-Doped Zinc Oxide Sputtering Target by Using A Submicrometer Zinc Oxide Powder

Ming-Wei Wu
DOI: https://doi.org/10.1016/j.ceramint.2012.04.076
IF: 5.532
2012-01-01
Ceramics International
Abstract:Aluminum-doped zinc oxide (AZO) is a potential substitute for tin-doped indium oxide due to its versatility. The properties of AZO films are related to those of the AZO sputtering target. To improve the performances of AZO targets, two-step sintering was used to densify a submicrometer zinc oxide (ZnO) powder with a size of 0.4 mu m to produce both AZO and ZnO targets.The results showed that the submicrometer ZnO powder cannot be densified by two-step sintering due to its coarse particle size and hexagonal structure. However, a 2 wt% additive of Al2O3 in ZnO can modify the kinetic window of two-step sintering and help in the densification. Using two-step sintering, the sintered density of the AZO target can be improved from 97.4% to 99.8%. The grain size is also reduced by 60%, from 9.1 mu m to 3.6 mu m. (c) 2012 Elsevier Ltd and Techna Group S.r.l. All rights reserved.
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