Dc electrical oxide thickness model for quantization of the inversion layer in MOSFETs

yachin king,h fujioka,shiroo kamohara,kai chen,chenming hu
DOI: https://doi.org/10.1088/0268-1242/13/8/001
IF: 2.048
1998-01-01
Semiconductor Science and Technology
Abstract:A simulator using the coupled Schrodinger equation, the Poisson equation and Fermi-Dirac statistics to analyse inversion-layer quantization has been shown to match the measured C-V data of thin-gate-oxide metal-oxide semiconductor (MOS) capacitors closely. This simulator is used to study in detail the effects of bias voltage, oxide thickness and doping concentration on the charge centroid and from this a simple empirical model for the do charge centroid of the inversion layer is proposed, This model predicts the inversion charge density in terms of T-ox, V-t and V-g explicitly and can be used to estimate transistor current in device engineering and circuit simulation models.
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