High Performance of Trigate Junctionless Nanowire Mosfet with P+ Sidewall

Ying Wang,Yan Tang,Meng-tian Bao
DOI: https://doi.org/10.1016/j.spmi.2015.09.034
IF: 3.22
2015-01-01
Superlattices and Microstructures
Abstract:The performance for P+ Sidewall Trigate Junctionless nanowire MOSFET is investigated. The new device has a P+ sidewall near the source. A comprehensive device comparison includes the subthreshold slope (SS), Drain-induced barrier lowering (DIBL) and the stability for threshold voltage (V-TH). High performance for SS and low leakage currents can be achieved by P+ sidewall JL. As a result, SS nearly at 70 mV/dec, I-ON/I-OFF > 10(6), and DIBL nearly at 60 mV are achieved at L-G = 10 nm for P+ sidewall JL NMOSFET, which is the highlighting excellent electrostatic performance for trigate JL NW MOSFEETs. (C) 2015 Published by Elsevier Ltd.
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