Abstract:Semi-polar ZnO films with surface texture were grown on glass substrates via pulsed-laser deposition (PLD) through Co-Ga co-doping. Oxygen pressure (PO2) was found to have significant effects on the structural and optical properties of the Zn(Co, Ga)O (ZCGO) films. A self-textured film with (1 0 (1) over bar 1) preferred orientation (PO) was achieved by varying the growth conditions including a crucial narrow PO2 window and growth time. A possible mechanism underlying the PO evolution and the final texture of the films was proposed, which can be attributed to the collaboration of the doping effect and the PO2-dependent evolutionary selection process, in which certain grains can have increased vertical growth rate with respect to the substrate surface through interplane diffusion. Moreover, the growth of undoped pure ZnO films proceeded by using the (1 0 (1) over bar 1) ZCGO film as a buffer layer. The ZnO layers retained a semi-polar characteristic with improved crystallinity and better optical quality. The epitaxy-like orientation of ZnO layers grown on (1 0 (1) over bar 1) ZCGO films has applications in the development of semi-polar ZnO-based light-emitting diodes.

Semipolar (11\bar 2\bar 2) ZnO Thin Films Grown on LaAlO3‐buffered LSAT (112) Single Crystals by Pulsed Laser Deposition

Defects In Semipolar (11(2)Over-Bar(2)Over-Bar) Zno Grown On (112) Laalo3/(La, Sr) (Al, Ta)O-3 Substrate By Pulsed Laser Deposition

Defects in Semipolar $(1 1\bar {2}\bar {2})$ ZnO Grown on (112) LaAlO3/(La,Sr)(Al,Ta)O3substrate by Pulsed Laser Deposition

Non-polar A-Plane ZnO Films Grown on R-Al2o3 Substrates Using GaN Buffer Layers

Structural and electrical properties of (110) ZnO epitaxial thin films on (001) SrTiO3 substrates

Polarity Control of ZnO Films Grown on Ferroelectric (0001) LiNbO3 Substrates without Buffer Layers by Pulsed-Laser Deposition

Research on Spectral-Properties of Nonpolar ZnO Film on Γ-Lialo2

Rational Growth of Semi-Polar Zno Texture on A Glass Substrate for Optoelectronic Applications

Epitaxial Growth Of Zno Films On (100) And (001) Gamma-Lialo2 Substrates By Pulsed Laser Deposition

Microstructure and Polarity of Epitaxial ZnO Films Grown on LSAT(111) Substrate Studied by Transmission Electron Microscopy

Epitaxial growth of ZnO films on (100) and (001) γ-LiAlO 2 substrates by pulsed laser deposition

Growth and Optical Properties of Nonpolar ($10{\bar {1}}0$) Zn1‐xCoxO Epitaxial Film on a Γ‐lialo2 Substrate

Polarity-Controlled Growth of High-Quality ZnO Epitaxial Films

Controlled Growth Of Zn-Polar Zno Films On Al-Terminated Alpha-Al2o3(0001) Surface By Using Wurtzite Mgo Buffer

Fabrication and Characteristics of ZnO Thin Films with an Al/Si (100) Substrates

Controlled Growth of Zn-Polar ZnO Films on Al-Terminated Α-Al 2 O 3 (0001) Surface by Using Wurtzite MgO Buffer

Zno Thin Film Grown by Metal-Organic Chemical Vapor Deposition

Characterization of M-Plane ZnO Thin Film on Γ-Lialo2 (1 0 0) Substrate by Metal-Organic Chemical Vapor Deposition

Growth of non-polar a -plane ZnO 1−x S x films by pulsed laser deposition

Preparation and Optical Properties of Zn0.85sb0.1o Alloy Films

Growth of ZnO thin films on LSAT(111) substrates by plasma-assisted radio-frequency molecular beam epitaxy