Defects In Semipolar (11(2)Over-Bar(2)Over-Bar) Zno Grown On (112) Laalo3/(La, Sr) (Al, Ta)O-3 Substrate By Pulsed Laser Deposition

Jr-Sheng Tian,Yue-Han Wu,Chun-Yen Peng,Kun-An Chiu,Yi-Sen Shih,Hien Do,Pei-Yin Lin,Yen-Teng Ho,Ying-Hao Chu,Li Chang
DOI: https://doi.org/10.1088/0953-8984/25/12/125801
2013-01-01
Abstract:The microstructure of semipolar (11 (2) over bar(2) over bar) ZnO deposited on (112) LaAlO3/(La, Sr) (Al, Ta)O-3 was investigated by transmission electron microscopy. The ZnO shows an in-plane epitaxial relationship of [11 (2) over bar3](ZnO) parallel to [11 (1) over bar](LAO/LSAT) with oxygen-face sense polarity. The misfit strain along [11 (2) over bar3](ZnO) and [1 (1) over bar 00](ZnO) is relieved through the formation of misfit dislocations with the Burgers vectors b = 1/6[11 (2) over bar3](ZnO) and b = 1/3 < 1 (2) over bar 10 >(ZnO), respectively. The line defects in the semipolar ZnO are predominantly perfect dislocations, and the dislocation density decreases with increasing ZnO thickness as a result of dislocation reactions. Planar defects were observed to lie in the M-plane and extend along < 0001 >, whereas basal stacking faults were rarely found.
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