Defects in Semipolar $(1 1\bar {2}\bar {2})$ ZnO Grown on (112) LaAlO3/(La,Sr)(Al,Ta)O3substrate by Pulsed Laser Deposition

Jr-Sheng Tian,Yue-Han Wu,Chun-Yen Peng,Kun-An Chiu,Yi-Sen Shih,Hien Do,Pei-Yin Lin,Yen-Teng Ho,Ying-Hao Chu,Li Chang
DOI: https://doi.org/10.1088/0953-8984/25/12/125801
2013-01-01
Journal of Physics Condensed Matter
Abstract:The microstructure of semipolar ( 1 1 2 ̄ 2 ̄ ) ?> ZnO deposited on (112) LaAlO3/(La,Sr)(Al,Ta)O3 was investigated by transmission electron microscopy. The ZnO shows an in-plane epitaxial relationship of [ 1 1 2 ̄ 3 ] ZnO ∥ [ 1 1 1 ̄ ] LAO/LSAT ?> with oxygen-face sense polarity. The misfit strain along [ 1 1 2 ̄ 3 ] ZnO ?> and [ 1 1 ̄ 0 0 ] ZnO ?> is relieved through the formation of misfit dislocations with the Burgers vectors b = 1 / 6 [ 1 1 2 ̄ 3 ] ZnO ?> and b = 1 / 3 ⟨ 1 2 ̄ 1 0 ⟩ ZnO ?> , respectively. The line defects in the semipolar ZnO are predominantly perfect dislocations, and the dislocation density decreases with increasing ZnO thickness as a result of dislocation reactions. Planar defects were observed to lie in the M-plane and extend along 〈0001〉, whereas basal stacking faults were rarely found.
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