Abstract:There have been many approaches for three-dimensional (3D) deformation measurement at the macro-scale, but these methods are mostly not applicable to 3D deformation measurement at the micro-scale due to the low resolution. With the broad application of the scanning electron microscope (SEM) at micro-scale measurement, in-situ deformation measurement under SEM has been made feasible. The 3D deformation measurement method based on digital phase shifting and the SEM system is proposed in this paper. In the proposed method, two SEM images of a specimen grating at different tilting angles are required to solve the in-plane and out-of-plane displacement. The digital generated reference grating is superimposed with the SEM images of a the specimen grating at different tilting angles to form the digital moire. Using the digital phase-shifting method, the phase information of the grating at different tilting angles can be acquired. With the derived relationship between the phase of the grating at different tilting angles and the in-plane and out-of-plane displacement, 3D displacement can be obtained. To verify the feasibility and assess the accuracy, a numerical experiment is conducted to reverse the given in-plane and out-of-plane deformation. The proposed method is used to measure the out-of-plane deformation of aluminum film on a soft substrate. The successful results indicate that this method is feasible and has the potential to be applied in 3D deformation measurement at micro-scale.

Novel 3D SEM Moiré method for micro height measurement.

Advances of Confocal Microscopy in Three-Dimensional Surface Topography Measurement

3D fluorescence emission difference microscopy based on spatial light modulator

A Measurement Method for Micro 3D Shape Based on Grids-Processing and Stereovision Technology

Microscopic 3D Structural Inversion Technique for Multilevel Periodic Structures with SEM Moiré Method

A Binocular Vision-Based 3D Sampling Moiré Method for Complex Shape Measurement

Stereovision System For 3-D Measurement Of Mems Components

Application of the digital phase-shifting method in 3D deformation measurement at micro-scale by SEM

A novel scanning tunneling microscopy for long range and high aspect ratio measurement

3D Measurement System of Micro-Organization Based on Two-Ray-path Scanning

3D sampling moire measurement for shape and deformation based on the binocular vision

Advanced Moiré Methods with High Resolution Scanning Microscopy and their Application

A new method for the characterization of micro-/nano-periodic structures based on microscopic Moiré fringes.

On-machine Measurement of a Slow Slide Servo Diamond-Machined 3D Microstructure with a Curved Substrate

Micro/nano moire methods

Enhanced accuracy in 3D structured illumination microscopy through binary encoding with accelerated speed using sampling Moiré

Micro/nano Moiré methods

Microscopic 3D measurement of shiny surfaces based on a multi-frequency phase-shifting scheme

Application of phase shifting technique for SEM scanning moire method im MEMS

New High-power Microscopy Moiré Measuring Techniques and Their Applications

Application of phase shifting technique for SEM scanning moiré method in MEMS