New High-power Microscopy Moiré Measuring Techniques and Their Applications

XIE Hui-min,WANG Qing-hua,PAN Bing,GUO Zhi-qiang,LI Yan-jie li,DAI Fu-long,Satoshi Kishimoto

DOI: https://doi.org/10.3969/j.issn.1001-4888.2007.03.002

2007-01-01

Abstract:This paper offers an introduction of two new high-power microscopy moire measuring techniques, i.e., Laser Scanning Confocal microscopy (LSCM) moire Method and Scanning Electron Microscopy (SEM) moire method. The formation and measurement principles of LSCM moire method and SEM moire method are described in detail and the comparison between these two moire methods is discussed. According to two kinds of application areas, i.e., measuring deformation and characterizing periodic structure of object surface, applications of these two moire methods are presented taking poly-crystal aluminum alloy plate and butterfly wing as the examples. LSCM moire method is used to measure the residual deformation of poly-crystal aluminum alloy plate and characterize the surface structure of Pieris rapae crucivora, while SEM moire method is used to characterize the surface structure of Papilio maackii Menetries. Experimental results demonstrate the feasibility, flexibility and high sensitivity of LSCM moire method and SEM moire method, both of which are effective, nondestructive as well as full-filed measuring techniques and will find broad application prospects in micro/nano-mechanics measurement and characterization.