Abstract:We present a new, robust three dimensional microfabrication method for highly parallel microfluidics, to improve the throughput of on-chip material synthesis by allowing parallel and simultaneous operation of many replicate devices on a single chip. Recently, parallelized microfluidic chips fabricated in Silicon and glass have been developed to increase the throughput of microfluidic materials synthesis to an industrially relevant scale. These parallelized microfluidic chips require large arrays (>10,000) of Through Silicon Vias (TSVs) to deliver fluid from delivery channels to the parallelized devices. Ideally, these TSVs should have a small footprint to allow a high density of features to be packed into a single chip, have channels on both sides of the wafer, and at the same time minimize debris generation and wafer warping to enable permanent bonding of the device to glass. Because of these requirements and challenges, previous approaches cannot be easily applied to produce three dimensional microfluidic chips with a large array of TSVs. To address these issues, in this paper we report a fabrication strategy for the robust fabrication of three-dimensional Silicon microfluidic chips consisting of a dense array of TSVs, designed specifically for highly parallelized microfluidics. In particular, we have developed a two-layer TSV design that allows small diameter vias (d < 20 µm) without sacrificing the mechanical stability of the chip and a patterned SiO2 etch-stop layer to replace the use of carrier wafers in Deep Reactive Ion Etching (DRIE). Our microfabrication strategy allows >50,000 (d = 15 µm) TSVs to be fabricated on a single 4" wafer, using only conventional semiconductor fabrication equipment, with 100% yield (M = 16 chips) compared to 30% using previous approaches. We demonstrated the utility of these fabrication strategies by developing a chip that incorporates 20,160 flow focusing droplet generators onto a single 4" Silicon wafer, representing a 100% increase in the total number of droplet generators than previously reported. To demonstrate the utility of this chip for generating pharmaceutical microparticle formulations, we generated 5-9 µm polycaprolactone particles with a CV < 5% at a rate as high as 60 g/hr (>1 trillion particles/hour).

"Overpass" at the Junction of a Crossed Microchannel: an Enabler for 3D Microfluidic Chips.

Integration of three-dimensional printing and microfluidics

High Efficiency Integration of Three-Dimensional Functional Microdevices Inside a Microfluidic Chip by Using Femtosecond Laser Multifoci Parallel Microfabrication.

Rapid Customization of 3d Integrated Microfluidic Chips Via Modular Structure-Based Design

Integration of Functional Microstructures Inside a Microfluidic Chip by Direct Femtosecond Laser Writing

Femtosecond Laser Direct Writing of Optical Overpass

Digital light processing 3D printing for microfluidic chips with enhanced resolution via dosing- and zoning-controlled vat photopolymerization

Freeform microfluidic networks encapsulated in laser printed three-dimensional macro-scale glass objects

Freeform Microfluidic Networks Encapsulated in Laser‐Printed 3D Macroscale Glass Objects

Three Dimensional Functional Microfluidic Chips Fabricated by Hybrid Femtosecond Laser Microfabrication

Multilayered skyscraper microchips fabricated by hybrid “all-in-one” femtosecond laser processing

Direct laser writing-enabled 3D printing strategies for microfluidic applications

Ultrafast Laser Fabrication of Functional Biochips: New Avenues for Exploring 3D Micro- and Nano-Environments

The Performance and Fabrication of 3D Variable Cross-Section Channel for Passive Microfluidic Control

Robust Microfabrication of Highly Parallelized Three-Dimensional Microfluidics on Silicon

Integrated Optofluidic-Microfluidic Twin Channels: Toward Diverse Application of Lab-on-a-chip Systems.

Embellishment of Microfluidic Devices Via Femtosecond Laser Micronanofabrication for Chip Functionalization

3D Printing of Individualized Microfluidic Chips with DLP-Based Printer

Femtosecond Laser Hybrid Fabrication of a 3D Microfluidic Chip for PCR Application

Barrier-free, open-top microfluidic chip for generating two distinct, interconnected 3D microvascular networks

Direct, one-step molding of 3D-printed structures for convenient fabrication of truly 3D PDMS microfluidic chips