Abstract:The high-precision integration of three-dimensional (3D) microoptical components into microfluidics in a customizable manner is crucial for optical sensing, fluorescence analysis, and cell detection in optofluidic applications; however, it remains challenging for current microfabrication technologies. This paper reports the in-channel integration of flexible two-dimensional (2D) and 3D polymer microoptical devices into glass microfluidics by developing a novel technique: flat scaffold-supported hybrid femtosecond laser microfabrication (FSS-HFLM). The scaffold with an optimal thickness of 1–5 µm is fabricated on the lower internal surface of a microfluidic channel to improve the integration of high-precision microoptical devices on the scaffold by eliminating any undulated internal channel surface caused by wet etching. As a proof of demonstration, two types of typical microoptical devices, namely, 2D Fresnel zone plates (FZPs) and 3D refractive microlens arrays (MLAs), are integrated. These devices exhibit multicolor focal spots, elongated (>three times) focal length and imaging of the characters ‘RIKEN’ in a liquid channel. The resulting optofluidic chips are further used for coupling-free white-light cell counting with a success rate as high as 93%. An optofluidic system with two MLAs and a W-filter is also designed and fabricated for more advanced cell filtering/counting applications. By fabricating microscale polymer lenses in hollow glass microchannels, scientists realize an optofluidic chip that detects and counts cells. This scheme works by employing a femtosecond laser to ‘grow’ by two-photon polymerization various three-dimensional optical structures, such as microlens arrays, on a flat polymer scaffold on the internal surface of a microfluidic channel. White light is then shone through the lenses and the presence of cells in the optical path is detected by a drop in light transmission. Dong Wu and co-workers from RIKEN’s Laser Technology Laboratory in Japan and Jilin University in China say that this fabrication approach could also prove useful for constructing a variety of active and passive micro-optic devices, such as optical switches, on-chip microlasers and amplifiers for lab-on-a-chip applications.

Integrated Optofluidic-Microfluidic Twin Channels: Toward Diverse Application of Lab-on-a-chip Systems.

Optical Micro/nanofibre Embedded Soft Film Enables Multifunctional Flow Sensing in Microfluidic Chips

Optofluidics: the Interaction Between Light and Flowing Liquids in Integrated Devices

Integrative Optofluidic Microcavity with Tubular Channels and Coupled Waveguides Via Two-Photon Polymerization

Various on-chip sensors with microfluidics for biological applications.

Various On-Chip Sensors with Microfluidics for Biological Applications

Optofluidics for Lab-On-A-Chip

In-channel Integration of Designable Microoptical Devices Using Flat Scaffold-Supported Femtosecond-Laser Microfabrication for Coupling-Free Optofluidic Cell Counting

Microfluidic Based Optical Microscopes on Chip

Fabrication of Micro/Nanofluidic Chip on Glass Substrate and Its Application for Electrokinetic Concentration of Proteins

High Efficiency Integration of Three-Dimensional Functional Microdevices Inside a Microfluidic Chip by Using Femtosecond Laser Multifoci Parallel Microfabrication.

Fabrication of full glass chips with hybrid micro- and nanochannels and their application to protein concentration

Optofluidic Tunable Lenses for In-Plane Light Manipulation

Lab-on-a-chip with integrated optical transducers

Integrated on-chip lens applied to microfluidic chips

Recent Development of Optofluidics for Imaging and Sensing Applications

Novel Optofluidic Imaging System Integrated with Tunable Microlens Arrays

Microfluidics and Photonics for Bio-System-On-A-Chip: A Review of Advancements in Technology Towards A Microfluidic Flow Cytometry Chip

Integration of Functional Microstructures Inside a Microfluidic Chip by Direct Femtosecond Laser Writing

All‐Glass 3D Optofluidic Microchip with Built‐in Tunable Microlens Fabricated by Femtosecond Laser‐Assisted Etching

Optofluidics in Microstructured Optical Fibers