Abstract:The high-precision integration of three-dimensional (3D) microoptical components into microfluidics in a customizable manner is crucial for optical sensing, fluorescence analysis, and cell detection in optofluidic applications; however, it remains challenging for current microfabrication technologies. This paper reports the in-channel integration of flexible two-dimensional (2D) and 3D polymer microoptical devices into glass microfluidics by developing a novel technique: flat scaffold-supported hybrid femtosecond laser microfabrication (FSS-HFLM). The scaffold with an optimal thickness of 1–5 µm is fabricated on the lower internal surface of a microfluidic channel to improve the integration of high-precision microoptical devices on the scaffold by eliminating any undulated internal channel surface caused by wet etching. As a proof of demonstration, two types of typical microoptical devices, namely, 2D Fresnel zone plates (FZPs) and 3D refractive microlens arrays (MLAs), are integrated. These devices exhibit multicolor focal spots, elongated (>three times) focal length and imaging of the characters ‘RIKEN’ in a liquid channel. The resulting optofluidic chips are further used for coupling-free white-light cell counting with a success rate as high as 93%. An optofluidic system with two MLAs and a W-filter is also designed and fabricated for more advanced cell filtering/counting applications. By fabricating microscale polymer lenses in hollow glass microchannels, scientists realize an optofluidic chip that detects and counts cells. This scheme works by employing a femtosecond laser to ‘grow’ by two-photon polymerization various three-dimensional optical structures, such as microlens arrays, on a flat polymer scaffold on the internal surface of a microfluidic channel. White light is then shone through the lenses and the presence of cells in the optical path is detected by a drop in light transmission. Dong Wu and co-workers from RIKEN’s Laser Technology Laboratory in Japan and Jilin University in China say that this fabrication approach could also prove useful for constructing a variety of active and passive micro-optic devices, such as optical switches, on-chip microlasers and amplifiers for lab-on-a-chip applications.

Fabrication of a microfluidic system with in situ-integrated microlens arrays using electrohydrodynamic jet printing

Novel Optofluidic Imaging System Integrated with Tunable Microlens Arrays

In Situ Fabrication of a Tunable Microlens.

Fabrication of Micro/Nanofluidic Chip on Glass Substrate and Its Application for Electrokinetic Concentration of Proteins

Fabrication of full glass chips with hybrid micro- and nanochannels and their application to protein concentration

In-channel Integration of Designable Microoptical Devices Using Flat Scaffold-Supported Femtosecond-Laser Microfabrication for Coupling-Free Optofluidic Cell Counting

Ship-in-a-bottle femtosecond laser integration of optofluidic microlens arrays with center-pass units enabling coupling-free parallel cell counting with a 100% success rate.

An integrated micro-millifluidic processing system

High Efficiency Integration of Three-Dimensional Functional Microdevices Inside a Microfluidic Chip by Using Femtosecond Laser Multifoci Parallel Microfabrication.

Facile Fabrication of Defogging Microlens Arrays Using Electric Field-Driven Jet Printing

Integrated Optofluidic-Microfluidic Twin Channels: Toward Diverse Application of Lab-on-a-chip Systems.

Tunable Microfluidic Optical Devices with an Integrated Microlens Array

Fabrication of polydimethylsiloxane nanofluidic chips under AFM tip-based nanomilling process

An easy-to-build and re-usable microfluidic system for live-cell imaging

Fabrication of Micro/nano Fluidic System Combining Hybrid Mask-Mould Lithography with Thermal Bonding

Fabrication of Close-Packed Microlens Array with Superhydrophobicity and High Imaging Performance

Optimization and Fabrication of Micro Diffractive Lens Arrays for Biochip Application

Freeform microfluidic networks encapsulated in laser printed three-dimensional macro-scale glass objects

Fabrication of Microlens Array with Controllable High NA and Tailored Optical Characteristics Using Confined Ink-Jetting

Microfabrication of A Digital Microfluidic Platform Integrated with an On-Chip Electrochemical Cell

Maskless fabrication of cell-laden microfluidic chips with localized surface functionalization for the co-culture of cancer cells.