Abstract:The high-precision integration of three-dimensional (3D) microoptical components into microfluidics in a customizable manner is crucial for optical sensing, fluorescence analysis, and cell detection in optofluidic applications; however, it remains challenging for current microfabrication technologies. This paper reports the in-channel integration of flexible two-dimensional (2D) and 3D polymer microoptical devices into glass microfluidics by developing a novel technique: flat scaffold-supported hybrid femtosecond laser microfabrication (FSS-HFLM). The scaffold with an optimal thickness of 1–5 µm is fabricated on the lower internal surface of a microfluidic channel to improve the integration of high-precision microoptical devices on the scaffold by eliminating any undulated internal channel surface caused by wet etching. As a proof of demonstration, two types of typical microoptical devices, namely, 2D Fresnel zone plates (FZPs) and 3D refractive microlens arrays (MLAs), are integrated. These devices exhibit multicolor focal spots, elongated (>three times) focal length and imaging of the characters ‘RIKEN’ in a liquid channel. The resulting optofluidic chips are further used for coupling-free white-light cell counting with a success rate as high as 93%. An optofluidic system with two MLAs and a W-filter is also designed and fabricated for more advanced cell filtering/counting applications. By fabricating microscale polymer lenses in hollow glass microchannels, scientists realize an optofluidic chip that detects and counts cells. This scheme works by employing a femtosecond laser to ‘grow’ by two-photon polymerization various three-dimensional optical structures, such as microlens arrays, on a flat polymer scaffold on the internal surface of a microfluidic channel. White light is then shone through the lenses and the presence of cells in the optical path is detected by a drop in light transmission. Dong Wu and co-workers from RIKEN’s Laser Technology Laboratory in Japan and Jilin University in China say that this fabrication approach could also prove useful for constructing a variety of active and passive micro-optic devices, such as optical switches, on-chip microlasers and amplifiers for lab-on-a-chip applications.

Ship-in-a-bottle femtosecond laser integration of optofluidic microlens arrays with center-pass units enabling coupling-free parallel cell counting with a 100% success rate.

Optical Micro/nanofibre Embedded Soft Film Enables Multifunctional Flow Sensing in Microfluidic Chips

In-channel Integration of Designable Microoptical Devices Using Flat Scaffold-Supported Femtosecond-Laser Microfabrication for Coupling-Free Optofluidic Cell Counting

[INVITED]Two photon polymerization integration of microlens arrays into 3D glass microchannel for cell counting

Lensless On-Chip Chemiluminescence Imaging for High-Throughput Single-Cell Heterogeneity Analysis.

Toward On-Chip Unidirectional and Single-Mode Polymer Microlaser

A Compact Optofluidic Cytometer with Integrated Liquid-Core/pdms-cladding Waveguides.

A Surface Acoustic Wave Pumped Lensless Microfluidic Imaging System for Flowing Cell Detection and Counting.

Fabrication of a microfluidic system with in situ-integrated microlens arrays using electrohydrodynamic jet printing

Integrative Optofluidic Microcavity with Tubular Channels and Coupled Waveguides Via Two-Photon Polymerization

Photocell-Based Optofluidic Device for Clogging-Free Cell Transit Time Measurements

Ship-in-a-bottle Integration by Hybrid Femtosecond Laser Processing for Fabrication of Highly Functional Biochips

Real-time Two-Photon Lithography in Controlled Flow to Create a Single-Microparticle Array and Particle-Cluster Array for Optofluidic Imaging.

High Efficiency Integration of Three-Dimensional Functional Microdevices Inside a Microfluidic Chip by Using Femtosecond Laser Multifoci Parallel Microfabrication.

Novel Optofluidic Imaging System Integrated with Tunable Microlens Arrays

Ship-in-a-bottle integration by hybrid femtosecond laser technology for fabrication of true 3D biochips

Integrated Optofluidic-Microfluidic Twin Channels: Toward Diverse Application of Lab-on-a-chip Systems.

Optofluidic Microlenses: All‐Glass 3D Optofluidic Microchip with Built‐in Tunable Microlens Fabricated by Femtosecond Laser‐Assisted Etching (advanced Optical Materials 9/2018)

Laser-induced Fluorescence Detection System for Microfluidic Chips Based on an Orthogonal Optical Arrangement.

Dual optofluidic distributed feedback dye lasers for multiplexed biosensing applications

Open flow cytometer with the combination of 3D hydrodynamic single cell focusing and confocal laser-induced fluorescence detection