P1–17: Controlled synthesis of Au and Ag/Au nanoparticles for fabrication of n-doped amorphous Si nanowire field emission cathode

Chunmiao Huang,She, Juncong,Shaozhi Deng,Jun Chen
DOI: https://doi.org/10.1109/IVNC.2010.5563180
2010-01-01
Abstract:A technique was reported on controlled synthesis of Au and Au/Ag nanoparticles using thermal (500°C) annealing of Au thin film and Ag/Au bilayer. The density of the nanoparticles can be adjusted in a range of 2.8×109 cm-2 to 6.2×1010 cm-2. The nanoparticles were used as masks for fabrications of vertically aligned amorphous Si nanowires (a-SiNWs) using dry etching. The mechanisms on the density control of Au, Ag/Au nanoparticles and the etching processes of the amorphous Si were discussed.
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