Fabrication of Ultrahigh-Density Nanowires by Electrochemical Nanolithography

Feng Chen,Hongquan Jiang,Arnold M Kiefer,Anna M Clausen,Yuk-Hong Ting,Amy E Wendt,Bingjun Ding,Max G Lagally
DOI: https://doi.org/10.1186/1556-276x-6-444
2011-01-01
Nanoscale Research Letters
Abstract:An approach has been developed to produce silver nanoparticles (AgNPs) rapidly on semiconductor wafers using electrochemical deposition. The closely packed AgNPs have a density of up to 1.4 × 1011 cm-2 with good size uniformity. AgNPs retain their shape and position on the substrate when used as nanomasks for producing ultrahigh-density vertical nanowire arrays with controllable size, making it a one-step nanolithography technique. We demonstrate this method on Si/SiGe multilayer superlattices using electrochemical nanopatterning and plasma etching to obtain high-density Si/SiGe multilayer superlattice nanowires.
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