Abstract:Nanofluidic systems are attracting a great deal of interest due to their fundamental significance and potential applications in chemistry, biology and physics. However, high fabrication cost, expensive equipments and complicated fabrication process of most current fabrication techniques prevent lots of researchers from entering the nanofluidic field. Here we present a quick, simple and cost-effective method for fabricating two-dimensional (2D) nanochannel in polycarbonate (PC) substrates. Silica nanowires, taper-drawn from commercially available single-mode fiber were used as templates and embedded in the PC substrate by hot embossing. The nanochannels were created after removing the nanowires by hydrofluoric acid (HF) etching. Poly(dimethylsiloxane) (PDMS) was used to seal the nanochannel reversibly. Nanochannels with widths range from 100 to 900 nm and lengths up to several millimeters were obtained. Various nanostructures including integrated micro and nanochannels, nanochannel array, bent nanochannel and cross-shaped nanochannel were fabricated and characterized by fluorescent microscope, scanning electron microscope (SEM) and atomic force microscope (AFM).

Fabrication of compact collateral silicon nanowires based on continuously alternating deposition

Simple and Cost-Effective Fabrication of Two-Dimensional Plastic Nanochannels from Silica Nanowire Templates

Tiny silicon nano-wires synthesis on silicon wafers

Selective etching of n-type silicon in pn junction structure in hydrofluoric acid and its application in silicon nanowire fabrication.

A facile nanowire fabrication approach based on edge lithography

Top-down fabrication of sub-30 nm monocrystalline silicon nanowires using conventional microfabrication

Silicon Nano-Wire Fabricated by Boe Silicon Etching

Fabrication of Single‐Crystalline Silicon Nanowires by Scratching a Silicon Surface with Catalytic Metal Particles

Fabrication of High-Compact Nanowires Using Alternating Photoresist Ashing and Spacer Technology

Silicon Nano-Wires Fabricated by Thermal Evaporation of Silicon Wafer

Silicon Nanowire Synthesis by Chemical Vapor Deposition

OS1503 Development of Highly Ordered Silicon Nanowire Array

A General Approach For Fabricating Arc-Shaped Composite Nanowire Arrays By Pulsed Laser Deposition

Dispersion, Refinement, and Manipulation of Single Silicon Nanowires

Engineering Island-Chain Silicon Nanowires Via a Droplet Mediated Plateau-Rayleigh Transformation

Fabrication of Conducting Si Nanowire Arrays

Fabrication and characterization of polycrystalline silicon nanowires with silver-assistance by electroless deposition

Fabrication of Silver Nanowires in Situ in Si Chip Based on a Novel Electrochemical Method

Fabrication and Properties of Large-Area Silicon Nanowire Arrays

Fabrication of Silicon Nanowire Arrays with Controlled Diameter, Length, and Density

Silicon nanowire aqueous dispersions for processing into macroscopic network materials