Abstract:Optical coupling between subwavelength grating pairs allows for the precise measurement of lateral or vertical displacement of grating elements and gives rise to different types of displacement and inertial sensors. In this paper, we demonstrate a design for a nano-optomechanical accelerometer based on a subwavelength grating pair that can be easily fabricated by a single Silicon-on-insulator (SOI) chip. The parameters of the subwavelength grating pair-based optical readout, including period, duty cycle, thickness of grating and metal film, and the distance of the air gap, were optimized by combining a genetic algorithm and rigorous coupled wavelength analysis (RCWA) to obtain the optimal sensitivity to the displacement of suspended grating element and the acceleration. A corresponding mechanical design was also completed to meet the highly sensitive acceleration measurement requirement while considering the mechanical cross-axis sensitivity, dynamic range, bandwidth, and fabrication feasibility. This device was verified by both RCWA and finite-different-time-domain methods, and a tolerance analysis was also completed to confirm that it is able to achieve the extremely high optical displacement sensitivity of 1.8%/nm, acceleration-displacement sensitivity of 1.56 nm/mg, and acceleration measurement sensitivity of more than 2.5%/mg, which is almost one order of magnitude higher than any reported counterparts. This work enables a single SOI-based high performance accelerometer, and provides a theoretical basis and fabrication guides for the design.

Microtribometer Based on a Rotational Grating Displacement Sensing Mechanism

A Compact Micromachined Interferometric Accelerometer Based on the Diffraction Grating

Measurement of static and dynamic friction coefficients of sidewalls of bulk-microfabricated MEMS devices with an on-chip micro-tribotester

Single Chip-Based Nano-Optomechanical Accelerometer Based on Subwavelength Grating Pair and Rotated Serpentine Springs

Mechanical Design Optimization of A Single-Axis Moems Accelerometer Based on A Grating Interferometry Cavity for Ultrahigh Sensitivity

Monolithic Integrated Micro-Opto-Electromechanical Accelerometer Based on Michelson Interferometer Structure

A MOEMS Accelerometer Based on Diffraction Grating with Improved Mechanical Structure.

Optical Design and Analysis of a High Resolution MOEMS Accelerometer Based on Diffraction Grating

A Micro-Tribotester for Evaluating Friction and Wear on Side Contacting Surfaces in Bulk-Microfabricated Devices

Running-In of Sidewall Friction in Bulk-Fabricated Microtribotester

A Single Crystal Silicon Based Micro-tribotester and Testing

An on-chip micro-friction tester for tribology research of silicon based MEMS devices

On-chip testing method for measurements of friction and wear in moveable MEMS devices

Micro-Opto-Electro-Mechanical Gyroscope Based On The Talbot Effect Of A Single-Layer Near-Field Diffraction Grating

Design Of A Composite Microtribology Experiment System For Silicon Sidewalls

Measurement of Slips at Contact Interfaces Using a Self-Powered Sensor Based on Triboelectric Nanogenerators

Friction characteristics of polymers applicable to small-scale devices

Design and Construction of a Micro-Tribotester for Precise In-Situ Wear Measurements

Design and Testing of Micro-Tribometer with Macro Applied Load

Experimental Study of Tribological Performance on Silicon Micro-textured Surface

COMPLEXITY IN THE MAJOR HISTOCOMPATIBILITY COMPLEX