Manipulation of Carbon Nanotubes (cnts) Profile by Pre-Annealed Ni/Ti/Si Substrate

H. C. Peng,C. C. Chieng,C. H. Tsai,F. G. Tseng

DOI: https://doi.org/10.1109/nems.2008.4484448

2008-01-01

Abstract:Well aligned CNTs on Ni/Ti/Si substrate were presented in this paper by the employment of pre-annealing process to the adhesive layer(Ti). SEM images show both the alignment and uniformity of the CNTs on pre-annealed substrates are better than that on non-treated substrate. The wall structures of the CNTs were also characterized and demonstrated different organizations. By this pre-annealing process, better current density could be achieved for the well- aligned CNTs from cyclic voltammetry test.